High Vacuum Molecular Pump (160mm Series)

• Customization: Available
• Material: Stainless Steel
• Power: Electric
• Model NO.: FF
• Valve Body Type: Butterfly
• Function: Intelligent Type
• Diaphragm Material: FPM
• Performance: Corrosion
• Theory: Vacuum Pump
• Structure: Single-Stage Pump
• Type: Blade Pump
• Transport Package: Wooden Case
• Trademark: SUOTO
• Origin: Shanghai, China
• HS Code: 8414100090
• Production Capacity: 20, 000 PCS/Year

Product Description

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.

Model	FF-160/500F	FF-160/620C	FF-160/700
Capacity(l/s)	500	600	700
H2 Compression Ratio	6× 10 3	6× 10 4	6× 10 6
N2 Compression Ratio	1× 10 9	1× 10 9	1× 10 9
Ultimate Pressure(Pa)	≤ 6× 10 -6 DN160 LF    ≤ 6× 10 -8 DN160 CF	≤ 6× 10 -7 DN160 LF    ≤ 6× 10 -8 DN160 CF	≤ 6× 10 -7 DN160 LF    ≤ 6× 10 -8 DN160 CF
Rotation Speed(RPM)	24000	36000	36000
Run up time(min)	< 5	< 6	< 4
Inlet Flange	KF40(DN40 ISO-KF)	KF40(DN40 ISO-KF)	KF40(DN40 ISO-KF)
Outlet Flange	LF160(DN160 ISO-K)	LF160(DN160 ISO-K)	LF160(DN160 ISO-K)
Bearing	standard	Ceramic bearing	Ceramic bearing
Backing pump(l/s)	4~8	4~8	4~8
Cooling water(º C)	≤ 25	≤ 25	≤ 25
Heating T(º C)	≤ 100	≤ 100	≤ 100
Ambient T(º C)	5~40	5~40	5~40
Oil filled(ml)	150	150	Grease lubricated
Install Orientation	vertical± 5°	vertical± 5°	any
Weight(kg)	29	29	19