The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.
The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.
| Model |
FF-160/500F |
FF-160/620C |
FF-160/700 |
| Capacity(l/s) |
500 |
600 |
700 |
| H2 Compression Ratio |
6× 10 3 |
6× 10 4 |
6× 10 6 |
| N2 Compression Ratio |
1× 10 9 |
1× 10 9 |
1× 10 9 |
| Ultimate Pressure(Pa) |
≤ 6× 10 -6 DN160 LF ≤ 6× 10 -8 DN160 CF |
≤ 6× 10 -7 DN160 LF ≤ 6× 10 -8 DN160 CF |
≤ 6× 10 -7 DN160 LF ≤ 6× 10 -8 DN160 CF |
| Rotation Speed(RPM) |
24000 |
36000 |
36000 |
| Run up time(min) |
< 5 |
< 6 |
< 4 |
| Inlet Flange |
KF40(DN40 ISO-KF) |
KF40(DN40 ISO-KF) |
KF40(DN40 ISO-KF) |
| Outlet Flange |
LF160(DN160 ISO-K) |
LF160(DN160 ISO-K) |
LF160(DN160 ISO-K) |
| Bearing |
standard |
Ceramic bearing |
Ceramic bearing |
| Backing pump(l/s) |
4~8 |
4~8 |
4~8 |
| Cooling water(º C) |
≤ 25 |
≤ 25 |
≤ 25 |
| Heating T(º C) |
≤ 100 |
≤ 100 |
≤ 100 |
| Ambient T(º C) |
5~40 |
5~40 |
5~40 |
| Oil filled(ml) |
150 |
150 |
Grease lubricated |
| Install Orientation |
vertical± 5° |
vertical± 5° |
any |
| Weight(kg) |
29 |
29 |
19 |
Audited Supplier 
Audited Supplier 
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