High Vacuum Molecular Pump (250mm Series)

• Customization: Available
• Material: Stainless Steel
• Power: Electric
• Model NO.: F
• Valve Body Type: Butterfly
• Function: Intelligent Type
• Diaphragm Material: FPM
• Performance: Corrosion
• Theory: Vacuum Pump
• Structure: Single-Stage Pump
• Type: Blade Pump
• Transport Package: Wooden Case
• Trademark: SUOTO
• Origin: Shanghai, China
• HS Code: 8414100090
• Production Capacity: 20, 000 PCS/Year

Product Description

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.

Model	F-250/1500	FF-250/1600	F-250/1800
Capacity(l/s)	1500	1600	1800
H2 Compression Ratio	3× 10 3	3× 10 3	3× 10 3
N2 Compression Ratio	1× 10 8	1× 10 8	1× 10 8
Ultimate Pressure(Pa)	≤ 6× 10 -6	≤ 1× 10 -6	≤ 1× 10 -6
Rotation Speed(RPM)	21000	27000	27000
Run up time(min)	< 8	< 8	< 8
Outlet Flange	KF50(DN50 ISO-KF)	KF50(DN50 ISO-KF)	KF40(DN40 ISO-KF)
Inlet Flange	LF250(DN250 ISO-K)	LF250(DN250 ISO-K)	LF250(DN250 ISO-K)
Bearing	standard	Ceramic bearing	Ceramic bearing
Backing pump(l/s)	15	15	15
Cooling water(º C)	≤ 25	≤ 25	≤ 25
Heating T(º C)	≤ 100	≤ 100	≤ 100
Ambient T(º C)	5~40	5~40	5~40
Oil filled(ml)	150	150	Grease lubricated
Install Orientation	vertical± 5°	vertical± 5º	any
Weight(kg)	60	47	42