Gold Member Since 2011
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Shanghai Suoto Pump Industrial Co., Ltd.

Liquid Ring Vacuum Pump, Vacuum Pump, Molecular Pump manufacturer / supplier in China, offering High Vacuum Turbo Molecular Pump (100mm Series), Roots-Liquid Ring Vacuum Pump Package (JZJS), Air-Cooled Hot (Thermal) Oil Pump (LQRY) and so on.

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Supplier Homepage Product Vacuum Pumps High Vacuum Turbo Molecular Pump (100mm Series)

High Vacuum Turbo Molecular Pump (100mm Series)

FOB Price: Get Latest Price
Min. Order: 1 Piece
Production Capacity: 20, 000 PCS/Year
Transport Package: Wooden Case
Payment Terms: L/C, T/T

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Basic Info
  • Material: Stainless Steel
  • Valve Body Type: Butterfly
  • Diaphragm Material: Viton
  • Theory: Vacuum Pump
  • Type: Blade Pump
  • Origin: Shanghai, China
  • Power: Electric
  • Function: Intelligent Type
  • Performance: No Leak
  • Structure: Single-Stage Pump
  • Trademark: SUOTO
  • HS Code: 8414100090
Product Description
The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.
H2 Compression Ratio5× 10 25× 10 2
N2 Compression Ratio1× 10 81× 10 8
Ultimate Pressure(Pa)≤ 6× 10 -6 DN100 LF
≤ 6× 10 -8 DN100 CF
≤ 6× 10 -6 DN100 LF
≤ 6× 10 -8 DN100 CF
Rotation Speed(RPM)4230042300
Run up time(min)< 2< 2
Inlet FlangeKF25(DN25 ISO-KF)KF25(DN25 ISO-KF)
Outlet FlangeLF100(DN100 ISO-KF)LF100(DN100 ISO-KF)                       
Backing pump(l/s)22
Cooling water(º C)≤ 25≤ 25
Heating T(º C)≤ 100≤ 100
Ambient T(º C)5~405~40
Oil filled(ml)2*62*6
Install Orientationanyany
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