High Vacuum Turbo Molecular Pump (100mm Series)

• Customization: Available
• Material: Stainless Steel
• Power: Electric
• Model NO.: F-100/110
• Valve Body Type: Butterfly
• Function: Intelligent Type
• Diaphragm Material: FPM
• Performance: No Leak
• Theory: Vacuum Pump
• Structure: Single-Stage Pump
• Type: Blade Pump
• Transport Package: Wooden Case
• Trademark: SUOTO
• Origin: Shanghai, China
• HS Code: 8414100090
• Production Capacity: 20, 000 PCS/Year

Product Description

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.

Model	F-100/110	F-100/150
Capacity(l/s)	110	150
H2 Compression Ratio	5× 10 2	5× 10 2
N2 Compression Ratio	1× 10 8	1× 10 8
Ultimate Pressure(Pa)	≤ 6× 10 -6 DN100 LF ≤ 6× 10 -8 DN100 CF	≤ 6× 10 -6 DN100 LF ≤ 6× 10 -8 DN100 CF
Rotation Speed(RPM)	42300	42300
Run up time(min)	< 2	< 2
Inlet Flange	KF25(DN25 ISO-KF)	KF25(DN25 ISO-KF)
Outlet Flange	LF100(DN100 ISO-KF)	LF100(DN100 ISO-KF)
Bearing	standard	standard
Backing pump(l/s)	2	2
Cooling water(º C)	≤ 25	≤ 25
Heating T(º C)	≤ 100	≤ 100
Ambient T(º C)	5~40	5~40
Oil filled(ml)	2*6	2*6
Install Orientation	any	any
Weight(kg)	8	8