The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.
The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.
| Model |
F-400/3500 |
| Capacity(l/s) |
3500 |
| H2 Compression Ratio |
5× 10 2 |
| N2 Compression Ratio |
1× 10 8 |
| Ultimate Pressure(Pa) |
≤ 6× 10 -6 |
| Rotation Speed(RPM) |
13500 |
| Run up time(min) |
< 18 |
| Outlet Flange |
KF100(DN100 ISO-KF) |
| Inlet Flange |
LF400(DN400 ISO-K) |
| Bearing |
Ceramic bearing |
| Backing pump(l/s) |
30 |
| Cooling water(º C) |
≤ 25 |
| Heating T(º C) |
≤ 80 |
| Ambient T(º C) |
5~40 |
| Oil filled(ml) |
150 |
| Install Orientation |
vertical± 5 |
| Weight(kg) |
136 |
Audited Supplier 
Audited Supplier 
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