High Vacuum Molecular Pump (400mm Series)

• Customization: Available
• Material: Stainless Steel
• Power: Electric
• Model NO.: F
• Valve Body Type: Butterfly
• Function: Intelligent Type
• Theory: Vacuum Pump
• Structure: Single-Stage Pump
• Type: Blade Pump
• Transport Package: Wooden Case
• Trademark: SUOTO
• Origin: Shanghai, China
• HS Code: 8414100090
• Production Capacity: 20, 000 PCS/Year

Product Description

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.

Model	F-400/3500
Capacity(l/s)	3500
H2 Compression Ratio	5× 10 2
N2 Compression Ratio	1× 10 8
Ultimate Pressure(Pa)	≤ 6× 10 -6
Rotation Speed(RPM)	13500
Run up time(min)	< 18
Outlet Flange	KF100(DN100 ISO-KF)
Inlet Flange	LF400(DN400 ISO-K)
Bearing	Ceramic bearing
Backing pump(l/s)	30
Cooling water(º C)	≤ 25
Heating T(º C)	≤ 80
Ambient T(º C)	5~40
Oil filled(ml)	150
Install Orientation	vertical± 5
Weight(kg)	136