High Vacuum Molecular Pump (200mm Series)

• Customization: Available
• Material: Stainless Steel
• Power: Electric
• Model NO.: FF
• Valve Body Type: Butterfly
• Function: Intelligent Type
• Diaphragm Material: FPM
• Performance: No Leak
• Theory: Vacuum Pump
• Structure: Single-Stage Pump
• Type: Blade Pump
• Transport Package: Wooden Case
• Trademark: SUOTO
• Origin: Shanghai, China
• HS Code: 8414100090
• Production Capacity: 20, 000 PCS/Year

Product Description

The turbo molecular pump is a mechanical vacuum pump with a rotor made of a fast rotating turbine blade, helical groove, or a combination of the two. The gas molecules enter the turbo molecular pump and collide with the surface of the rotors creating kinetic energy causing the gas molecules to move toward the turbomolecular pump exhaust.

The pumps offer full magnetic levitation rotor, which provides a clean, reliable vacuum for today's semiconductor and solar industries. It features a five axis magnetic bearing and half rack controller requiring no tuning or battery backup, high compression, and corrosion resistant.

Model	FF-200/1200C	FF-200/1300
Capacity(l/s)	1200	1300
H2 Compression Ratio	6× 10 3	6× 10 3
N2 Compression Ratio	1× 10 9	1× 10 9
Ultimate Pressure(Pa)	≤ 1× 10 -6 DN200 LF ≤ 1× 10 -7 DN200 CF	≤ 6× 10 -6 DN200 LF ≤ 6× 10 -7 DN200 CF
Rotation Speed(RPM)	27000	24000
Run up time(min)	< 6	< 6
Outlet Flange	KF40(DN40 ISO-KF)	KF40(DN40 ISO-KF)
Inlet Flange	LF200(DN200 ISO-K)	LF160(DN160 ISO-K)
Bearing	Ceramic bearing	Ceramic bearing
Backing pump(l/s)	15	15
Cooling water(º C)	≤ 25	≤ 25
Heating T(º C)	≤ 100	≤ 100
Ambient T(º C)	5~40	5~40
Oil filled(ml)	150	Grease lubricated
Install Orientation	vertical± 5°	any
Weight(kg)	39	29